LCD, LED, SOLAR 등의 대유량의 Gas를 처리하기 위한 Scrubber로 유해한 성분의 Gas를 직접산화하는 방식이며 PFC Gas등을 포함한 모든 Gas의 처리가 가능하다.       Independent 6 waste gas inlet Multi pressure monitoring & Alarm Automatic by-pass valves Designed for prevention powder deposition & Humidity High reliability & High Efficiency Small foot print & Back pressure free Multi Temperature Monitor & Alarm Multi Pressure Monitoring & Alarm Dual flame sensor Anti-corrosion material structure       ITEM Dimension Electric Power Inlet Port LNG O2 CDA N2 PCW CW NaOH Exhaust Cabinet Exhaust Drain Specification 1250(W)x1100(D)x2122(H) 1 Phase, 208V NW40Flange_6Port 1/2"VCR, 0.3~1.8kgf/cm2 1/2"VCR, 5~6kgf/cm2 1/2"LOK, 5~6.5kgf/cm2 1/2"LOK, 4~5kgf/cm2 3/4"LOK, 3~6kgf/cm2 1/2"LOK, 3~6kgf/cm2 1 1/2"Doulbe Pipe MF100Flange,-30~-100mmH2O MF100Flange,-30~-60mmH2O 20A(PVC)       반도체 공정에서 사용되는 유해한 성분의 Gas를 직접 불꽃 사이로 통과시키면서 Gas를 처리하는 방식으로 PFC Gas등을 포함한 모든 Gas의 처리가 가능하다.       Pressure sensor at waste gas inlet Pressure sensor in the combustion reactor Temperature sensor in the scrubber Temperature sensor in the lye recirculation tank Flow sensor for the cabinet exhaust Fuel gas leakage sensor in the cabinet Leakage sensors in the safety tank Independent flame sensors in the combustion reactor Flow meters in the scrubber supply       ITEM Dimension Electric Power Inlet Port LNG O2 CDA N2 PCW CW NaOH Exhaust Cabinet Exhaust Drain Specification (single) 960(W)x670(D)x1800(H) 3Plase, 208V NW40Flange_4Port 1/2"VCR, 0.3~1.8kgf/cm2 1/2"VCR, 5~6kgf/cm2 1/2"LOK, 5~6.5kgf/cm2 1/2"LOK, 4~5kgf/cm2 1/2"LOK, 3~6kgf/cm2 1/2"LOK, 3~6kgf/cm2 1 1/2"DoulbePipe MF100Flange,-30~-60mmH2O MF100Flange,-30~-60mmH2O 15A(PVC) Specification (DUO) 1650(W)x775(D)x1800(H) 3Plase, 208V NW25Flange_8Port 1/2"VCR, 0.3~1.8kgf/cm2 1/2"VCR, 5~6kgf/cm2 1/2"LOK, 5~6.5kgf/cm2 1/2"LOK, 3~6kgf/cm2 3/4"LOK, 3~6kgf/cm2 3/4"LOK, 3~6kgf/cm2 1 1/2"DoulbePipe MF100Flange,-30~-60mmH2O MF100Flange,-30~-60mmH2O 20A(PVC)