반도체 공정중 Photo의 PR 감광액의 온도를 일정하게 유지시켜주는 설비
주요 사용공정 : Photo track 설비용
   
 





- Photo
   
  - High temperature control accuracy(±0.05℃)
- Independent temperature control up to 14 channels
- Fit for CE & SEMI
- Easy Maintenance(2satge)
- Environment-friendly System(Non-CFC)
 
 
   
  ITEM
Dimension
Channel
Temperature Range
Cooling Capacity
Temperature accuracy
Flow Rate
Circulation Liquid
Electrical Spec 		Specification
780 x 1630 x 1920 (W x D x H)
13 Channel
each 20°C ~ 25°C
each 700 watts
each ±0.05°C at ldle
7 LPM
DI
208V, 3P 4W, 60A