Inquiries
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Unmatched maintenance innovation featuring the perfect combination of modular design and ultra-efficient burnersBurn WetGAIA-I SINGLE- Total Capacity
- 1,000 slm
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, ETCH, METAL, etc.
- Dimension
- 1000X780X1874
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A next-generation electric plasma gas treatment technology setting a new standard for carbon neutralityPlasma WetGAIA-P SINGLE- Total Capacity
- 1,000 slm
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, ETCH, METAL, etc.
- Dimension
- 950X1000X1842
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A next-generation low-carbon purification technology innovation platformHeat-Catalyst WetMiTHAs I- Total Capacity
- 1,000 slm
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- ETCH
- Dimension
- 900X1100X1950
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Integrated pump system delivering breakthrough installation cost savingsIntegrated Vacuum and Abatement SystemiVAS- Total Capacity
- 1,000 slm * 2 EA
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, ETCH, METAL, etc.
- Dimension
- 3720X1268X1811
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Ultimate high-capacity purification with a next-level 6,000 CMH solutionWetGAIA GARAM- Total Capacity
- 6,000 CMH
- Target Gas
- RCA Cleaning gas (> 95%)
- Target Process
- Wet Cleaning
- Dimension
- 2400X1500X2350
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Eco-Innovation Realizing Low-Carbon Emissions through Absorption & Catalyst TechnologyWetSOOPIA-C- Total Capacity
- 1,000 slm
- Target Gas
- H2<5% (>99%)
- Target Process
- some processes of METAL ETCH
- Dimension
- 1600X1100X1870
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Dry Treatment Designed to be Simple, Efficient, and SafeDrySDS-500- Total Capacity
- 250 slm
- Target Gas
- Cl2 (> 99%), BCl3
- Target Process
- METAL ETCH, IMPLANT, etc.
- Dimension
- 650X590X1750
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Sustainable Gas removal Platform Enabled by Rotary Water InjectionWetSWS-I- Total Capacity
- 1,000 slm
- Target Gas
- Water soluble gas
- Target Process
- Wet Cleaning
- Dimension
- 900X750X1795
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A next-generation electric plasma gas treatment technology setting a new standard for carbon neutralityPlasma WetGAIA-P DUAL- Total Capacity
- 1,000 slm * 2 EA
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, ETCH, METAL, etc.
- Dimension
- 1900X1000X1842
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Innovation Delivering Installation Efficiency and Energy Savings TogetherBurn WetGAIA-EV6- Total Capacity
- 600 slm
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- ETCH
- Dimension
- 1200X730X1870
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