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Products
A Company Innovating Technology
and Delivering Sustainable Value
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Scrubber
Chiller
Liquid Cooling
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Scrubber
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Type
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Burn Wet
Plasma Wet
Heat-Catalyst Wet
Wet
Dry
Integrated Vacuum and Abatement System
Burn-Air
Total Capacity
250 slm
600 slm
1,000 slm
1,000 slm * 2 EA
6,000 slm
6,000 CMH
2,000 slm
Target Gas
PFCs (> 99%)
RCA Cleaning gas (> 95%)
Cl2 (> 99%)
H2<5% (>99%)
Corrosive
Flammable gases
Water soluble gas
HFCs
BCl3
etc.
Target Process
DIFF
CVD
ETCH
METAL
METAL ETCH
some processes of METAL ETCH
Wet Cleaning
IMPLANT
etc.