
Inquiries
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Unmatched maintenance innovation featuring the perfect combination of modular design and ultra-efficient burnersBurn WetGAIA-I SINGLE
- Total Capacity
- 1,000 slm
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, ETCH, METAL, etc.
- Dimension
- 1000X780X1874
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Unmatched maintenance innovation featuring the perfect combination of modular design and ultra-efficient burnersBurn WetGAIA-I DUAL
- Total Capacity
- 1,000 slm * 2 EA
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, ETCH, METAL, etc.
- Dimension
- 1840X780X1874
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