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  • Unmatched maintenance innovation featuring the perfect combination of modular design and ultra-efficient burners
    Burn Wet
    GAIA-I SINGLE
    Total Capacity
    1,000 slm
    Target Gas
    PFCs (> 99%), HFCs, etc.
    Target Process
    DIFF, CVD, ETCH, METAL, etc.
    Dimension
    1000X780X1874
  • Unmatched maintenance innovation featuring the perfect combination of modular design and ultra-efficient burners
    Burn Wet
    GAIA-I DUAL
    Total Capacity
    1,000 slm * 2 EA
    Target Gas
    PFCs (> 99%), HFCs, etc.
    Target Process
    DIFF, CVD, ETCH, METAL, etc.
    Dimension
    1840X780X1874
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