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  • A next-generation electric plasma gas treatment technology setting a new standard for carbon neutrality
    Plasma Wet
    GAIA-P SINGLE
    Total Capacity
    1,000 slm
    Target Gas
    PFCs (> 99%), HFCs, etc.
    Target Process
    DIFF, CVD, ETCH, METAL, etc.
    Dimension
    950X1000X1842
  • A next-generation electric plasma gas treatment technology setting a new standard for carbon neutrality
    Plasma Wet
    GAIA-P DUAL
    Total Capacity
    1,000 slm * 2 EA
    Target Gas
    PFCs (> 99%), HFCs, etc.
    Target Process
    DIFF, CVD, ETCH, METAL, etc.
    Dimension
    1900X1000X1842
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