
Inquiries
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A next-generation electric plasma gas treatment technology setting a new standard for carbon neutralityPlasma WetGAIA-P SINGLE
- Total Capacity
- 1,000 slm
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, ETCH, METAL, etc.
- Dimension
- 950X1000X1842
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A next-generation electric plasma gas treatment technology setting a new standard for carbon neutralityPlasma WetGAIA-P DUAL
- Total Capacity
- 1,000 slm * 2 EA
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, ETCH, METAL, etc.
- Dimension
- 1900X1000X1842
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