-
独一无二的维护创新，模块化设计与超高效率燃烧器的完美结合Burn WetGAIA-I SINGLE- Total Capacity
- 1,000 slm
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, Etch, Metal, etc.
- Dimension
- 1000X780X1874
-
独一无二的维护创新，模块化设计与超高效率燃烧器的完美结合Burn WetGAIA-I DUAL- Total Capacity
- 1,000 slm * 2 EA
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, Etch, Metal, etc.
- Dimension
- 1840X780X1874
1