-
碳中和的新标杆，下一代电气等离子体气体净化技术Plasma WetGAIA-P SINGLE- Total Capacity
- 1,000 slm
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, Etch, Metal, etc.
- Dimension
- 950X1000X1842
-
碳中和新标准：新一代电力等离子体气体净化技术Plasma WetGAIA-P DUAL- Total Capacity
- 1,000 slm * 2 EA
- Target Gas
- PFCs (> 99%), HFCs, etc.
- Target Process
- DIFF, CVD, Etch, Metal, etc.
- Dimension
- 1900X1000X1842
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